IMOS vacuum reflectors
In evacuated process chambers, materials are subjected to particular
stresses.
When production processes need to be monitored using reflective sensors,
IMOS vacuum reflectors are ideal. They can be easily scanned by sensors
from outside the evacuated process chamber.
Conventional reflectors or plastic sheeting can release material traces in a
vacuum and thereby endanger the high-purity production process. IMOS vacuum
reflectors do not do this, and are consequently used, for example, in the
reflection sensor systems of silicon processing plants.
